Cyclohexasilane is a binary inorganic compound of silicon and hydrogen with the chemical formula .
Reaction of lithium tetrahydroaluminate and hexasilicon dodecachloride:
Also, pyrolysis of monosilane and disilane by heating at low pressure followed by fractional distillation.
Cyclohexasilane forms a colorless liquid that reacts with water.
The compound is soluble in ethanol and carbon disulfide.
Cyclohexasilane is an important precursor for the deposition of silicon layers from liquid silicon inks in the semiconductor industry.