Wayne Township is one of nine townships in DuPage County, Illinois, United States. As of the 2020 census, its population was 64,427 and it contained 21,788 housing units.
According to the 2021 census gazetteer files, Wayne Township has a total area of , of which (97.19%) is land and (2.81%) is water.
(This list is based on USGS data and may include former settlements.)
The township contains these three cemeteries: Illinois Pet, Ontarioville, and Wayne Township.
As of the 2020 census, there were 64,427 people, 21,808 households, and 17,925 families residing in the township. The population density was . There were 21,788 housing units at an average density of . The racial makeup of the township was 63.31% White, 3.05% African American, 0.46% Native American, 18.25% Asian, 0.03% Pacific Islander, 6.42% from other races, and 8.48% from two or more races. Hispanic or Latino of any race were 14.75% of the population.
The township government consists of a Supervisor, four Trustees, a Clerk, an Assessor, and a Highway Commissioner, all elected to four-year terms by the voters at large.