Tungsten tetrafluoride is an inorganic compound with the formula WF<sub>4</sub>. This little studied solid has been invoked, together with tungsten pentafluoride, as an intermediate in the chemical vapor deposition of tungsten films using tungsten hexafluoride.
Tungsten tetrafluoride was found to have polymeric structure based on Mössbauer spectroscopy.
It has been prepared by treatment of the coordination complex WCl<sub>4</sub>(MeCN)<sub>2</sub> with AsF<sub>3</sub>. It has been produced by from the reaction of WF<sub>6</sub> and a W filament at 600-800 ðC.
The compound can be re-oxidized to W(VI) compounds by treatment with fluorine and chlorine:
Upon heating, it disproportionates to WF<sub>6</sub> and tungsten metal.