Tetramethylsilane (abbreviated as TMS) is the organosilicon compound with the formula Si(CH<sub>3</sub>)<sub>4</sub>. It is a colorless liquid. It is the simplest tetraorganosilane. Like all silanes, the TMS framework is tetrahedral. TMS is a building block in organometallic chemistry but also finds use in diverse niche applications.
TMS is a by-product of the production of methyl chlorosilanes, SiCl<sub>x</sub>(CH<sub>3</sub>)<sub>4−x</sub>, via the direct process of reacting methyl chloride with silicon. The more useful products of this reaction are those for x = 1 (trimethylsilyl chloride), 2 (dimethyldichlorosilane), and 3 (methyltrichlorosilane).
TMS undergoes deprotonation upon treatment with butyllithium to give (H<sub>3</sub>C)<sub>3</sub>SiCH<sub>2</sub>Li. The latter, trimethylsilylmethyl lithium, is a relatively common alkylating agent.
Contrariwise, shaking with sulfuric acid gives methane and trimethylsilyl bisulfate.
In chemical vapor deposition, TMS is the precursor to silicon dioxide or silicon carbide, depending on the deposition conditions. In the formation of silicon carbide, carbosilanes, such as 1,3,5,7-tetramethyl-1,3,5,7-tetrasilaadamantane, are observed as intermediates.
Tetramethylsilane is the accepted internal standard for calibrating chemical shift for <sup>1</sup>H, <sup>13</sup>C and <sup>29</sup>Si NMR spectroscopy in organic solvents (where TMS is soluble). In water, where it is not soluble, sodium salts of DSS, 2,2-dimethyl-2-silapentane-5-sulfonate, are used instead. Because of its high volatility, TMS can easily be evaporated, which is convenient for recovery of samples analyzed by NMR spectroscopy.
Because all twelve hydrogen atoms in a tetramethylsilane molecule are equivalent, its <sup>1</sup>H NMR spectrum consists of a singlet. The chemical shift of this singlet is assigned as ô 0, and all other chemical shifts are determined relative to it. The majority of compounds studied by <sup>1</sup>H NMR spectroscopy absorb downfield of the TMS signal, thus there is usually no interference between the standard and the sample. Similarly, all four carbon atoms in a tetramethylsilane molecule are equivalent. In a fully decoupled <sup>13</sup>C NMR spectrum, the carbon in the tetramethylsilane appears as a singlet, allowing for easy identification. The chemical shift of this singlet is also set to be ô 0 in the <sup>13</sup>C spectrum, and all other chemical shifts are determined relative to it.