Molybdenum(V) fluoride is an inorganic compound with the formula MoF<sub>5</sub>. It is a hygroscopic yellow solid. Like most pentafluorides, it exists as a tetramer.
Molybdenum(V) fluoride is produced by the reaction of molybdenum and molybdenum hexafluoride:
It can also be prepared by the reduction of molybdenum hexafluoride with phosphorus trifluoride or tungsten hexacarbonyl, or by the oxidation of elemental molybdenum with fluorine at 900 ðC.
About 165 ðC, it disproportionates to the tetra- and hexafluoride: