A microactuator is a microscopic servomechanism that supplies and transmits a measured amount of energy for the operation of another mechanism or system. As a general actuator, following standards have to be met:
For microactuator, there are two in addition
The basic principle can be described as the expression for mechanical work<br /> <br /> since an actuator is to manipulate positions and therefore force is needed. For different kind of microactuators, different physical principles are applied.
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